• DocumentCode
    299876
  • Title

    A precision angular sensing system

  • Author

    Sakuta, Shigeru ; Youcef-Toumi, Kamal

  • Author_Institution
    Toshiba Corp., Japan
  • Volume
    1
  • fYear
    1995
  • fDate
    21-27 May 1995
  • Firstpage
    381
  • Abstract
    A precision angular sensing system based on scanning tunneling microscopy (STM) is presented. The proposed system consists of three STM tips for the tracking of atoms of a reference lattice. This method will offer a real-time precision angular measurement system of pitch, roll and yaw with nano-radian resolution. The conceptual design is first described along with the computation of angles. A kinematic error analysis is also conducted for predicting the performance of the sensing system. A prototype system is described and experimental results involving atom tracking and angle measurements are presented. The proposed system achieves resolutions on the order of 1 nano-radian for all angle measurements. The strokes associated with the pitch and roll are on the order of 5×10-5 deg
  • Keywords
    Atomic measurements; Error analysis; Goniometers; Kinematics; Lattices; Lithography; Machining; Target tracking; Transmission electron microscopy; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Automation, 1995. Proceedings., 1995 IEEE International Conference on
  • Conference_Location
    Nagoya
  • ISSN
    1050-4729
  • Print_ISBN
    0-7803-1965-6
  • Type

    conf

  • DOI
    10.1109/ROBOT.1995.525314
  • Filename
    525314