DocumentCode :
299876
Title :
A precision angular sensing system
Author :
Sakuta, Shigeru ; Youcef-Toumi, Kamal
Author_Institution :
Toshiba Corp., Japan
Volume :
1
fYear :
1995
fDate :
21-27 May 1995
Firstpage :
381
Abstract :
A precision angular sensing system based on scanning tunneling microscopy (STM) is presented. The proposed system consists of three STM tips for the tracking of atoms of a reference lattice. This method will offer a real-time precision angular measurement system of pitch, roll and yaw with nano-radian resolution. The conceptual design is first described along with the computation of angles. A kinematic error analysis is also conducted for predicting the performance of the sensing system. A prototype system is described and experimental results involving atom tracking and angle measurements are presented. The proposed system achieves resolutions on the order of 1 nano-radian for all angle measurements. The strokes associated with the pitch and roll are on the order of 5×10-5 deg
Keywords :
Atomic measurements; Error analysis; Goniometers; Kinematics; Lattices; Lithography; Machining; Target tracking; Transmission electron microscopy; Tunneling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Robotics and Automation, 1995. Proceedings., 1995 IEEE International Conference on
Conference_Location :
Nagoya
ISSN :
1050-4729
Print_ISBN :
0-7803-1965-6
Type :
conf
DOI :
10.1109/ROBOT.1995.525314
Filename :
525314
Link To Document :
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