DocumentCode
299876
Title
A precision angular sensing system
Author
Sakuta, Shigeru ; Youcef-Toumi, Kamal
Author_Institution
Toshiba Corp., Japan
Volume
1
fYear
1995
fDate
21-27 May 1995
Firstpage
381
Abstract
A precision angular sensing system based on scanning tunneling microscopy (STM) is presented. The proposed system consists of three STM tips for the tracking of atoms of a reference lattice. This method will offer a real-time precision angular measurement system of pitch, roll and yaw with nano-radian resolution. The conceptual design is first described along with the computation of angles. A kinematic error analysis is also conducted for predicting the performance of the sensing system. A prototype system is described and experimental results involving atom tracking and angle measurements are presented. The proposed system achieves resolutions on the order of 1 nano-radian for all angle measurements. The strokes associated with the pitch and roll are on the order of 5×10-5 deg
Keywords
Atomic measurements; Error analysis; Goniometers; Kinematics; Lattices; Lithography; Machining; Target tracking; Transmission electron microscopy; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation, 1995. Proceedings., 1995 IEEE International Conference on
Conference_Location
Nagoya
ISSN
1050-4729
Print_ISBN
0-7803-1965-6
Type
conf
DOI
10.1109/ROBOT.1995.525314
Filename
525314
Link To Document