DocumentCode
2998839
Title
On-the-fly characterization of NBTI in ultra-thin gate oxide PMOSFET´s
Author
Denais, M. ; Parthasarathy, C. ; Ribes, G. ; Rey-Tauriac, Y. ; Revil, N. ; Bravaix, A. ; Huard, V. ; Perrier, F.
Author_Institution
STMicroekctronics, Philips Semicond., Crolles, France
fYear
2004
fDate
13-15 Dec. 2004
Firstpage
109
Lastpage
112
Abstract
We propose a new methodology to characterize the negative bias temperature instability (NBTI) degradation without inherent recovery. The extracted parameters are the linear drain current, the threshold voltage and the transconductance. We compare the new and the usual methodologies and show a logarithmic time dependence of both the degradation and the recovery. The hole trapping (detrapping) is directly correlated to the VT degradation (recovery), and plays the main role in the NBTI in ultra-thin gate-oxide PMOSFET´s.
Keywords
MOSFET; hole traps; integrated circuit reliability; NBTI; drain current; hole trapping; negative bias temperature instability degradation; on-the-fly characterization; threshold voltage; transconductance parameter; ultra-thin gate oxide PMOSFET; Current measurement; Degradation; MOSFET circuits; Niobium compounds; Pulse measurements; Stress measurement; Time measurement; Titanium compounds; Transconductance; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
Print_ISBN
0-7803-8684-1
Type
conf
DOI
10.1109/IEDM.2004.1419080
Filename
1419080
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