• DocumentCode
    2998839
  • Title

    On-the-fly characterization of NBTI in ultra-thin gate oxide PMOSFET´s

  • Author

    Denais, M. ; Parthasarathy, C. ; Ribes, G. ; Rey-Tauriac, Y. ; Revil, N. ; Bravaix, A. ; Huard, V. ; Perrier, F.

  • Author_Institution
    STMicroekctronics, Philips Semicond., Crolles, France
  • fYear
    2004
  • fDate
    13-15 Dec. 2004
  • Firstpage
    109
  • Lastpage
    112
  • Abstract
    We propose a new methodology to characterize the negative bias temperature instability (NBTI) degradation without inherent recovery. The extracted parameters are the linear drain current, the threshold voltage and the transconductance. We compare the new and the usual methodologies and show a logarithmic time dependence of both the degradation and the recovery. The hole trapping (detrapping) is directly correlated to the VT degradation (recovery), and plays the main role in the NBTI in ultra-thin gate-oxide PMOSFET´s.
  • Keywords
    MOSFET; hole traps; integrated circuit reliability; NBTI; drain current; hole trapping; negative bias temperature instability degradation; on-the-fly characterization; threshold voltage; transconductance parameter; ultra-thin gate oxide PMOSFET; Current measurement; Degradation; MOSFET circuits; Niobium compounds; Pulse measurements; Stress measurement; Time measurement; Titanium compounds; Transconductance; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-8684-1
  • Type

    conf

  • DOI
    10.1109/IEDM.2004.1419080
  • Filename
    1419080