Miniature SAW Device for RF-Wireless Applications Using MEMS Technology

Author

Zaki, Amal ; Elsimary, Hamed ; Zaghloul, Mona

Author_Institution

Electron. Res. Inst., Cairo

Volume

2

fYear

2006

fDate

6-9 Aug. 2006

Firstpage

109

Lastpage

112

Abstract

A miniature SAW device is designed and fabricated at 1 GHz for wireless communication system. A 5 mum thin film of ZnO is successfully deposited using RF sputtering technique on PECVD SiO₂ layer of 1 mum on top of Si wafer under various operating conditions. The c-axis oriented ZnO film exhibit a sharp diffraction peak corresponding to the (002) reflection at 2thetas=34.42. The fabrication process utilizing the MEMS technology of the SAW device is described simulation of the RF SAW filter is performed. Measurements and experimental work are presented for the RF SAW device.

Keywords

II-VI semiconductors; UHF filters; X-ray diffraction; acoustic microwave devices; elemental semiconductors; micromechanical devices; plasma CVD; radiocommunication; semiconductor thin films; silicon; silicon compounds; sputter deposition; surface acoustic wave filters; zinc compounds; MEMS technology; PECVD; RF SAW device; RF SAW filter simulation; RF sputtering technique; RF-wireless applications; SiO₂-Si; XRD; ZnO; diffraction peak value; fabrication process; frequency 1 GHz; miniature SAW device design; size 1 mum; size 5 mum; wireless communication system; zinc oxide thin film deposition; Diffraction; Micromechanical devices; Optical films; Radio frequency; Reflection; Semiconductor thin films; Sputtering; Surface acoustic wave devices; Wireless communication; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2006. MWSCAS '06. 49th IEEE International Midwest Symposium on

Conference_Location

San Juan

ISSN

1548-3746

Print_ISBN

1-4244-0172-0

Electronic_ISBN

1548-3746

Type

conf

DOI

10.1109/MWSCAS.2006.382220

Filename

4267298