DocumentCode

2999419

Title

To A Model Of The Mechanism Of LMIS Emission

Author

Ptitsin, V.E.

Author_Institution

Russian-Academy of Sciences

fYear

1993

fDate

12-15 Jul 1993

Firstpage

48

Lastpage

49

Keywords

Atomic layer deposition; Current density; Electrons; Frequency estimation; Ion emission; Ionization;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700267

Filename

700267