Title :
To A Model Of The Mechanism Of LMIS Emission
Author_Institution :
Russian-Academy of Sciences
Keywords :
Atomic layer deposition; Current density; Electrons; Frequency estimation; Ion emission; Ionization;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700267
