DocumentCode

2999814

Title

Characterization Of Gated Silicon Field Emission Micro Triodes

Author

Liu, D. ; Marcus, R.B.

Author_Institution

ERSO/ITRI

fYear

1993

fDate

12-15 Jul 1993

Firstpage

52

Lastpage

53

Keywords

Chemical technology; Chemistry; Circuit testing; Current measurement; Microelectronics; Physics; Process control; Silicon; Voltage; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700269

Filename

700269