Joule expansion imaging techniques on microlectronic devices

Author

Grauby, S. ; Lopez, L-D Patino ; Salhi, A. ; Puyoo, E. ; Rampnoux, J.-M. ; Claeys, W. ; Dilhaire, S.

Author_Institution

Univ. Bordeaux 1, Talence

fYear

2007

fDate

17-19 Sept. 2007

Firstpage

174

Lastpage

179

Abstract

We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.

Keywords

image resolution; integrated circuits; light interferometry; Joule expansion imaging techniques; microlectronic devices; optical interferometry method; scanning Joule expansion microscopy; scanning thermal microscopy; spatial resolution; Amplifiers; Atomic force microscopy; Cutoff frequency; Feedback loop; Frequency measurement; Optical interferometry; Optical surface waves; Resistors; Surface topography; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal Investigation of ICs and Systems, 2007. THERMINIC 2007. 13th International Workshop on

Conference_Location

Budapest

Print_ISBN

978-2-35500-002-7

Type

conf

DOI

10.1109/THERMINIC.2007.4451772

Filename

4451772