Title :
Joule expansion imaging techniques on microlectronic devices
Author :
Grauby, S. ; Lopez, L-D Patino ; Salhi, A. ; Puyoo, E. ; Rampnoux, J.-M. ; Claeys, W. ; Dilhaire, S.
Author_Institution :
Univ. Bordeaux 1, Talence
Abstract :
We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.
Keywords :
image resolution; integrated circuits; light interferometry; Joule expansion imaging techniques; microlectronic devices; optical interferometry method; scanning Joule expansion microscopy; scanning thermal microscopy; spatial resolution; Amplifiers; Atomic force microscopy; Cutoff frequency; Feedback loop; Frequency measurement; Optical interferometry; Optical surface waves; Resistors; Surface topography; Temperature measurement;
Conference_Titel :
Thermal Investigation of ICs and Systems, 2007. THERMINIC 2007. 13th International Workshop on
Conference_Location :
Budapest
Print_ISBN :
978-2-35500-002-7
DOI :
10.1109/THERMINIC.2007.4451772
