Title :
Micro-hotplates for thermal characterisation of structural materials of MEMS
Author :
Fürjes, P. ; Csíkvári, P. ; Bársony, I. ; Dücsö, Cs
Author_Institution :
Res. Inst. for Tech. Phys. & Mater. Sci. -MFA, Budapest
Abstract :
Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure.
Keywords :
diamond; heat measurement; microsensors; multilayers; silicon compounds; size effect; MEMS; formation processes; mechanical properties; micro-hotplates; multilayer microheater structure; size effects; structural materials; thermal characterisation; thermal properties; thermal responses; thermal sensor structures; Chemical sensors; Chemical vapor deposition; Etching; Micromechanical devices; Physics; Plasma temperature; Silicon; Thermal conductivity; Thermal sensors; Thermal stresses; material properties; micro-heater; thermal analysis;
Conference_Titel :
Thermal Investigation of ICs and Systems, 2007. THERMINIC 2007. 13th International Workshop on
Conference_Location :
Budapest
Print_ISBN :
978-2-35500-002-7
DOI :
10.1109/THERMINIC.2007.4451774
