Title :
Fabrication And Characterization Of Silicon Field Emission Diodes And Triodes
Author :
Yaun, Meiying ; Tong, Shihao ; Li, Qiong ; Xu, Jingfang ; Zhang, Duan ; Wu, Junlei
Author_Institution :
East China Normal University
Keywords :
Anodes; Character recognition; Diodes; Electron emission; Fabrication; Oxidation; Silicon; Vacuum technology; Voltage; Wet etching;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700270
