DocumentCode :
3000190
Title :
Knife-edge Thin Film Field Emission Cathodes On [110] Silicon Wafers
Author :
Lee, Bo ; Elliott, T.S. ; Mazumdar, T.K. ; McIntyre, P.M. ; Pang, Y. ; Trost, H.J.
Author_Institution :
Texas A&M University
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
56
Lastpage :
57
Keywords :
Anisotropic magnetoresistance; Capacitance; Cathodes; Cutoff frequency; Dielectric substrates; Etching; Field emitter arrays; Microwave amplifiers; Semiconductor thin films; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700271
Filename :
700271
Link To Document :
بازگشت