Title :
Low Work Function Suspended Silicon Field Fmssion Tips With Integrated Lateral Resistor And Suspended Gate Electrode
Author :
Das, John H. ; Spallas, James P. ; MacDonald, Noel C.
Author_Institution :
Cornell University
Keywords :
Apertures; Electrodes; Resistors; Silicon;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700272
