Title :
{113} defect-engineered silicon light-emitting diodes
Author :
Pan, G.Z. ; Ostroumov, R.P. ; Lian, Y.G. ; Tu, K.N. ; Wang, K.L.
Author_Institution :
Microfabrication Lab., California Univ., Los Angeles, CA, USA
Abstract :
We correlated electroluminescence of p-n junction silicon light-emitting diodes (Si LEDs) with boron implant-induced defects and found that {113} defects other than dislocation loops result in strong silicon light emissions. The electroluminescence of {113} defect engineered Si LEDs is twenty-five times higher than dislocation loop engineered Si LEDs. This finding, for the first time, is highly significant for monolithic Si nanophotonics.
Keywords :
boron; electroluminescence; light emitting diodes; p-n junctions; silicon; Si; boron implantation; defect engineering; dislocation loops; electroluminescence; light emissions; monolithic Si nanophotonics; p-n junction; silicon light-emitting diodes; Annealing; Boron; Electroluminescence; Implants; Integrated optics; Laboratories; Light emitting diodes; Nanophotonics; P-n junctions; Silicon;
Conference_Titel :
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
Print_ISBN :
0-7803-8684-1
DOI :
10.1109/IEDM.2004.1419152