• DocumentCode
    3000628
  • Title

    An empirical potential approach to the formation of InAs stacking-fault tetrahedron in InAs/GaAs(111)

  • Author

    Ito, Tomonori ; Joe, Hidenori ; Akiyama, Toru ; Nakamura, Kohji ; Kanisawa, Kiyoshi

  • Author_Institution
    Dept. of Phys. Eng., Mie Univ., Tsu
  • fYear
    2008
  • fDate
    July 28 2008-Aug. 1 2008
  • Firstpage
    86
  • Lastpage
    89
  • Abstract
    The structural stability of InAs stacking-fault tetrahedron (InAs-SFT) on GaAs(111) is systematically investigated in terms of strain relaxation by using an empirical potential incorporating electrostatic energy contribution. The InAs-SFT is more stable than coherently grown InAs on GaAs(111) beyond 21 monolayers (MLs), which are comparable with critical film thickness of misfit dislocation generation. Furthermore, SFT formation in InAs is more favorable than threading dislocation formation below the film thickness of ~60 MLs. These calculated results are qualitatively consistent with experimental results.
  • Keywords
    III-V semiconductors; dislocations; gallium arsenide; indium compounds; monolayers; semiconductor thin films; stacking faults; GaAs; InAs-GaAs; InAs/GaAs(111); critical film thickness; electrostatic energy contribution; misfit dislocation generation; monolayers; stacking-fault tetrahedron; strain relaxation; structural stability; threading dislocation; Capacitive sensors; Electrostatics; Molecular beam epitaxial growth; Multilevel systems; Power engineering and energy; Semiconductor films; Semiconductor nanostructures; Stacking; Structural engineering; Transistors; computer simulation; defects; molecular beam epitaxy; nanostructures; semiconducting indium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices, 2008. COMMAD 2008. Conference on
  • Conference_Location
    Sydney, SA
  • ISSN
    1097-2137
  • Print_ISBN
    978-1-4244-2716-1
  • Electronic_ISBN
    1097-2137
  • Type

    conf

  • DOI
    10.1109/COMMAD.2008.4802098
  • Filename
    4802098