• DocumentCode
    3000781
  • Title

    Various annealing methods for activation of arsenic in Molecular Beam Epitaxy grown HgCdTe

  • Author

    Tsen, G.K.O. ; Zhang, J. ; Musca, C.A. ; Dell, J.M. ; Antoszewski, J. ; Faraone, L.

  • Author_Institution
    Sch. of Electr., Univ. of Western Australia, Perth, WA
  • fYear
    2008
  • fDate
    July 28 2008-Aug. 1 2008
  • Firstpage
    125
  • Lastpage
    128
  • Abstract
    Extrinsic p-type doping of Mercury Cadmium Telluride (HgCdTe) epilayers grown by Molecular Beam Epitaxy (MBE) was carried out with an arsenic (As) cracker cell. As-grown samples were characterised via Fourier Transform Infrared Transmission Spectrometry (FTIR) and Secondary Ion Mass Spectrometry (SIMS). A preliminary study on various activation annealing techniques is made, where HgCdTe layers were annealed under Hg overpressures in a closed tube furnace at varying temperatures to either activate arsenic and/or, to eliminate Hg vacancies. Variable field magneto-transport measurements coupled with the quantitative mobility spectrum analysis (QMSA) were then utilised to study the Hall effect characteristics of the annealed material.
  • Keywords
    Fourier transform spectra; Hall effect; annealing; arsenic; cadmium compounds; infrared spectra; mercury compounds; molecular beam epitaxial growth; secondary ion mass spectra; semiconductor doping; semiconductor epitaxial layers; semiconductor growth; ternary semiconductors; Fourier transform infrared transmission spectrometry; Hall effect; HgCdTe:As; annealing; epilayers; magneto-transport; molecular beam epitaxy; p-type doping; quantitative mobility spectrum analysis; secondary ion mass spectrometry; vacancies; Annealing; Cadmium compounds; Doping; Fourier transforms; Furnaces; Infrared spectra; Magnetic materials; Mass spectroscopy; Mercury (metals); Molecular beam epitaxial growth;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices, 2008. COMMAD 2008. Conference on
  • Conference_Location
    Sydney, SA
  • ISSN
    1097-2137
  • Print_ISBN
    978-1-4244-2716-1
  • Electronic_ISBN
    1097-2137
  • Type

    conf

  • DOI
    10.1109/COMMAD.2008.4802107
  • Filename
    4802107