Title :
Electron Beam Stimulated Deposition For FEA Fabrication
Author :
Shaw, J.L. ; Gray, H.F.
Author_Institution :
Naval Research Laboratory
Keywords :
Apertures; Cooling; Electron beams; Fabrication; Iron; Laboratories; Microscopy; Reflective binary codes; Substrates; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700276
