Title :
Device fabrication scheme for evaporated SPC poly-Si thin-film solar cells on glass (EVA)
Author :
Kunz, Oliver ; Ouyang, Zi ; Wong, Johnson ; Aberle, Armin G.
Author_Institution :
Photovoltaics Centre of Excellence, Univ. of New South Wales, Sydney, NSW
fDate :
July 28 2008-Aug. 1 2008
Abstract :
Polycrystalline silicon thin-film solar cells on glass obtained by solid phase crystallisation (SPC) of PECVD-deposited a-Si have good photovoltaic efficiency. In this paper we present a functioning device fabrication scheme for equivalent solar cells made from evaporated SPC poly-Si films (EVA). Respectable efficiencies of above 4% are achieved for both p-type and n-type EVA solar cells on planar glass superstrates. The various hurdles that had to be passed to achieve these results are described.
Keywords :
chemical vapour deposition; elemental semiconductors; semiconductor thin films; silicon; solar cells; PECVD; Si; device fabrication scheme; evaporated SPC poly-Si thin-film solar cells; functioning device fabrication scheme; glass; photovoltaic efficiency; polycrystalline silicon thin-film solar cells; solid phase crystallisation; Crystallization; Fabrication; Glass; Photovoltaic cells; Photovoltaic systems; Semiconductor thin films; Silicon; Solar power generation; Solids; Thin film devices; device fabrication; metallisation; poly-silicon; shunting; thin-film solar cells;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2008. COMMAD 2008. Conference on
Conference_Location :
Sydney, SA
Print_ISBN :
978-1-4244-2716-1
Electronic_ISBN :
1097-2137
DOI :
10.1109/COMMAD.2008.4802149
