Title :
Demonstration of Silicon Microdisk Resonators Compatible with Active Integration: Ultra-high Q and Efficient Waveguide-Resonator Coupling
Author :
Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
Silicon-on-insulator microdisk resonators with efficient planar-integrated input-output coupling are demonstrated. Two structures of fully-etched and partially-etched microdisk-on- substrate, compatible with active integration are fabricated and compared. Experimental quality factors about 2.5 times 106 and critical coupling are observed.
Keywords :
Q-factor; integrated optics; micro-optics; microcavities; optical resonators; optical waveguides; silicon-on-insulator; Si; efficient planar-integrated input-output coupling; silicon-on-insulator microdisk resonators; ultra-high Q; waveguide-resonator coupling; Fabrication; Integrated optics; Optical devices; Optical refraction; Optical resonators; Optical variables control; Optical waveguides; Q factor; Silicon on insulator technology; Tellurium;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452438
