Title :
Heat accumulation effects in femtosecond laser ablation of ITO thin films for DEP trapping devices
Author :
Xu, M.Y. ; Hosseini, S.A. ; Lilge, L.D. ; Herman, P.R.
Author_Institution :
Univ. of Toronto, Toronto
Abstract :
Heat accumulation effects, during high repetition rate (0.1 to 2.0 MHz) Yb fiber femtosecond laser ablation of transparent ITO films, are advantageous to pattern transparent microelectrodes for dielectrophoretic trapping of micropheres on a biochip.
Keywords :
electrophoresis; high-speed optical techniques; indium compounds; laser ablation; microelectrodes; thin films; ytterbium; DEP trapping devices; ITO; Yb; biochip; dielectrophoretic trapping; femtosecond laser ablation; heat accumulation effects; microelectrodes; micropheres; transparent ITO thin films; Electrodes; Etching; Fiber lasers; Glass; Indium tin oxide; Laser ablation; Optical films; Substrates; Thin film devices; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452443
