• DocumentCode
    3002284
  • Title

    Heat accumulation effects in femtosecond laser ablation of ITO thin films for DEP trapping devices

  • Author

    Xu, M.Y. ; Hosseini, S.A. ; Lilge, L.D. ; Herman, P.R.

  • Author_Institution
    Univ. of Toronto, Toronto
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Heat accumulation effects, during high repetition rate (0.1 to 2.0 MHz) Yb fiber femtosecond laser ablation of transparent ITO films, are advantageous to pattern transparent microelectrodes for dielectrophoretic trapping of micropheres on a biochip.
  • Keywords
    electrophoresis; high-speed optical techniques; indium compounds; laser ablation; microelectrodes; thin films; ytterbium; DEP trapping devices; ITO; Yb; biochip; dielectrophoretic trapping; femtosecond laser ablation; heat accumulation effects; microelectrodes; micropheres; transparent ITO thin films; Electrodes; Etching; Fiber lasers; Glass; Indium tin oxide; Laser ablation; Optical films; Substrates; Thin film devices; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452443
  • Filename
    4452443
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3002284