• DocumentCode
    3002372
  • Title

    Effect of Pulse Shaping on Silicon Micromachining Monitored by Laser Induced Breakdown Spectroscopy and Surface Second Harmonic Generation

  • Author

    Gunaratne, Tissa C. ; Zhu, Xin ; Lozovoy, Vadim ; Dantus, Marcos

  • Author_Institution
    Michigan State Univ., East Lansing
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Pulse shaping on silicon micromachining is explored using laser induced breakdown spectroscopy and surface second harmonic generation as diagnostics. The morphology of ablated holes for different shaped pulses will be discussed.
  • Keywords
    laser ablation; micromachining; optical harmonic generation; optical pulse shaping; silicon; ablated hole morphology; laser induced breakdown spectroscopy; pulse shaping; silicon micromachining; surface second harmonic generation; Electric breakdown; Frequency conversion; Micromachining; Monitoring; Optical pulse shaping; Pulse shaping methods; Silicon; Spectroscopy; Surface emitting lasers; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452446
  • Filename
    4452446
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3002372