Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
We report the growth of β-Ga2O3 nanowires using a vapor phase transport method and the fabrication of β-Ga2O3 nanowire gas sensor. The β-Ga2O3 nanowire sensor shows reversible response to isopropyl alcohol (IPA) gas at temperature as low as 100 °C. With 300 ppm IPA gas introduced, it was found that measured responses were ~ 7.5%, 13.5%, and 23% when the sensor was operated at 100 °C, 200 °C, and 300 °C, respectively. It was also found that the responses measured at 300 °C were ~ 9%, 15.5%, 24%, and 33% when the injected IPA gas concentrations were 100, 200, 300, and 400 ppm, respectively.
Keywords :
chemical variables measurement; gallium compounds; gas sensors; nanofabrication; nanosensors; nanowires; organic compounds; Ga2O3; injected IPA gas concentration; nanowire gas sensor fabrication; nanowire isopropyl alcohol sensor; response measurement; temperature 100 degC; temperature 200 degC; temperature 300 degC; vapor phase transport method; Educational institutions; Fabrication; Gas detectors; Gold; Temperature measurement; Temperature sensors; $betahbox{-}{rm Ga}_{2}{rm O}_{3}$; IPA; gas sensor; nanowire; response;