DocumentCode :
30026
Title :
Highly Sensitive \\beta {-}{\\rm Ga}_{2}{\\rm O}_{3} Nanowire Nanowires Isopropyl Alcohol Sensor
Author :
Ya-Ling Wu ; Qiuping Luan ; Shoou-Jinn Chang ; Zhiyong Jiao ; Wen Yin Weng ; Yo-Hong Lin ; Cheng Liang Hsu
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Volume :
14
Issue :
2
fYear :
2014
fDate :
Feb. 2014
Firstpage :
401
Lastpage :
405
Abstract :
We report the growth of β-Ga2O3 nanowires using a vapor phase transport method and the fabrication of β-Ga2O3 nanowire gas sensor. The β-Ga2O3 nanowire sensor shows reversible response to isopropyl alcohol (IPA) gas at temperature as low as 100 °C. With 300 ppm IPA gas introduced, it was found that measured responses were ~ 7.5%, 13.5%, and 23% when the sensor was operated at 100 °C, 200 °C, and 300 °C, respectively. It was also found that the responses measured at 300 °C were ~ 9%, 15.5%, 24%, and 33% when the injected IPA gas concentrations were 100, 200, 300, and 400 ppm, respectively.
Keywords :
chemical variables measurement; gallium compounds; gas sensors; nanofabrication; nanosensors; nanowires; organic compounds; Ga2O3; injected IPA gas concentration; nanowire gas sensor fabrication; nanowire isopropyl alcohol sensor; response measurement; temperature 100 degC; temperature 200 degC; temperature 300 degC; vapor phase transport method; Educational institutions; Fabrication; Gas detectors; Gold; Temperature measurement; Temperature sensors; $betahbox{-}{rm Ga}_{2}{rm O}_{3}$; IPA; gas sensor; nanowire; response;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2013.2283885
Filename :
6613568
Link To Document :
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