Customer oriented technologies for innovative leading edge foundry manufacturing

Author

Yang, S. ; Chen, J. ; Chen, S. ; Chen, Z. ; Fan, A. ; He, B. ; Jiang, Q. ; Kuang, E. ; Lin, Yeou-Fu ; Liu, Y. ; Ning, J. ; Pai, C.-H. ; Sun, P. ; Tang, D. ; Wu, H.M. ; Xing, G.-Q. ; Xu, J. ; Yu, X. ; Zhang, J. ; Zheng, X.W. ; Zhi, C.

Author_Institution

Semicond. Manuf. Int. Corp., Shanghai, China

fYear

2004

fDate

13-15 Dec. 2004

Firstpage

673

Lastpage

676

Abstract

A leading edge of CMOS technology and foundry manufacturing in mainland China is described in the present paper. In the technology development, effective yield learning methodology is created to shorten the learning cycle for mass production. It is shown that the innovative manufacturing provides unique values for customers. It is also demonstrated that the right cost structure based on both optimized process and device design can insure the cost control very effective. The discussion of methodology of bringing up the fab to spec, yield issues, and processing development for such a highly complex entity has been included in the paper.

Keywords

CMOS integrated circuits; integrated circuit yield; mass production; CMOS technology; China; customer oriented technologies; device design; foundry manufacturing; mass production; process optimization; yield learning methodology; CMOS technology; Cost function; Dielectric materials; Foundries; Lead compounds; Logic devices; Production; Pulp manufacturing; Random access memory; Semiconductor device manufacture;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International

Print_ISBN

0-7803-8684-1

Type

conf

DOI

10.1109/IEDM.2004.1419257

Filename

1419257