Title :
High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC
Author :
Jun-Bo Yoon ; Chul-Hi Han ; Euisik Yoon ; Choong-Ki Kim
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14 nH, a peak Q of 38 at 1.8 GHz with area occupation of 500 /spl mu/m by 500 /spl mu/m excluding pads (56 nH/mm/sup 2/) from a stacked spiral inductor on a glass substrate. Also, 1.75 nH and a peak Q of 57 at 10 GHz have been obtained from a levitated spiral inductor.
Keywords :
MMIC; UHF integrated circuits; electroplating; inductors; micromachining; photolithography; 1.8 GHz; 10 GHz; 500 micron; RF MMIC; levitated spiral inductor; micromachining technology; peak Q; small area occupation; stacked spiral inductor; three-dimensional on-chip inductors; Copper; Electrodes; Etching; Fabrication; Frequency; Inductors; Micromachining; Nickel; Resists; Spirals;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.780245
