• DocumentCode
    3003488
  • Title

    Characterization and modeling of hysteresis phenomena in high K dielectrics

  • Author

    Leroux, C. ; Mitard, J. ; Ghibaudo, G. ; Garros, X. ; Reimbold, G. ; Guillaumor, B. ; Martin, F.

  • Author_Institution
    CEA-LETI, Grenoble, France
  • fYear
    2004
  • fDate
    13-15 Dec. 2004
  • Firstpage
    737
  • Lastpage
    740
  • Abstract
    An original technique for the dynamic analysis of Id(Vg) hysteresis on high K stacks is proposed, allowing the characterization of Vt shift transients at short times. The experimental results demonstrate that trapping/de-trapping mechanism by tunneling from the substrate must be considered. Furthermore, a new model based on a trap-like approach is successfully developed to interpret the dependence of hysteresis phenomena with high k gate stack architecture.
  • Keywords
    dielectric hysteresis; dielectric materials; electron traps; tunnelling; de-trapping mechanism; high K dielectrics; high k gate stack architecture; hysteresis phenomena; shift transients; trapping mechanism; tunneling; High K dielectric materials; High-K gate dielectrics; Hysteresis; Kinetic theory; Measurement techniques; Microelectronics; Thickness measurement; Transient analysis; Tunneling; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-8684-1
  • Type

    conf

  • DOI
    10.1109/IEDM.2004.1419276
  • Filename
    1419276