• DocumentCode
    3003762
  • Title

    Bandwidth-Tunable Add-Drop Filters Based on MEMS-Actuated Single-Crystalline Silicon Microtoroidal Resonators

  • Author

    Yao, Jin ; Wu, Ming C.

  • Author_Institution
    Univ. of California, Berkeley
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A bandwidth-tunable filter has been demonstrated by MEMS-actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.
  • Keywords
    elemental semiconductors; micromechanical resonators; silicon; MEMS- actuated single-crystalline silicon microtoroidal resonators; Si; bandwidth-tunable filter; dynamic add-drop filter; Bandwidth; Optical fiber filters; Optical fiber polarization; Optical filters; Optical resonators; Optical tuning; Optical waveguides; Resonator filters; Silicon; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452526
  • Filename
    4452526