Title :
On-wafer calibration using space-conservative (SOLT) standards
Author :
Imparato, M. ; Weller, T. ; Dunleavy, L.
Author_Institution :
Dept. of Electr. Eng., Univ. of South Florida, Tampa, FL, USA
Abstract :
In this paper the accuracy of on-wafer calibration using space-conservative (SOLT) standards is evaluated. The calibration approach relies on measurement-based standard definitions. Results are presented using CPW standards with 50 and 300 micron offsets, over the range from .045-65 GHz. In comparing to a multi-line TRL, the magnitude of the difference between the S-parameters is less than 0.05 up to 40 GHz, and below 0.1 up to 65 GHz.
Keywords :
S-parameters; calibration; measurement standards; microwave measurement; 0.045 to 65 GHz; CPW standard; S-parameters measurement; multi-line TRL; on-wafer calibration; space-conservative SOLT standard; Calibration; Coplanar waveguides; Delay lines; Frequency; Geometry; Length measurement; Measurement standards; Propagation constant; Resistors; Transmission line measurements;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.780285
