DocumentCode
3003894
Title
On-wafer calibration using space-conservative (SOLT) standards
Author
Imparato, M. ; Weller, T. ; Dunleavy, L.
Author_Institution
Dept. of Electr. Eng., Univ. of South Florida, Tampa, FL, USA
Volume
4
fYear
1999
fDate
13-19 June 1999
Firstpage
1643
Abstract
In this paper the accuracy of on-wafer calibration using space-conservative (SOLT) standards is evaluated. The calibration approach relies on measurement-based standard definitions. Results are presented using CPW standards with 50 and 300 micron offsets, over the range from .045-65 GHz. In comparing to a multi-line TRL, the magnitude of the difference between the S-parameters is less than 0.05 up to 40 GHz, and below 0.1 up to 65 GHz.
Keywords
S-parameters; calibration; measurement standards; microwave measurement; 0.045 to 65 GHz; CPW standard; S-parameters measurement; multi-line TRL; on-wafer calibration; space-conservative SOLT standard; Calibration; Coplanar waveguides; Delay lines; Frequency; Geometry; Length measurement; Measurement standards; Propagation constant; Resistors; Transmission line measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location
Anaheim, CA, USA
Print_ISBN
0-7803-5135-5
Type
conf
DOI
10.1109/MWSYM.1999.780285
Filename
780285
Link To Document