DocumentCode :
3004100
Title :
Bonding Formation Of Semiconductor Surface With Different Materials By Radiation Technology
Author :
Bakhtizin, R. ; Makhov, V. ; Suvorov, A.
Author_Institution :
Bashkir State University
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
86
Lastpage :
86
Keywords :
Atomic layer deposition; Bonding; Materials reliability; Physics; Reliability theory; Semiconductor device reliability; Semiconductor films; Semiconductor materials; Solid state circuits; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700290
Filename :
700290
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3004100
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