DocumentCode

3004378

Title

Calculated I-V Characteristics Of A Gold LMIS Using The Image Hump And Charge Exchange Models

Author

Miskovsy, S.N. ; Miskovsky, N.M. ; Cutler, P.H.

Author_Institution

The Pennsylvania State University

fYear

1993

fDate

12-15 Jul 1993

Firstpage

90

Lastpage

91

Keywords

Circuits; Gold; Helium; Ion beams; Ion sources; Lithography; Physics; Predictive models; Shape; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700293

Filename

700293