Title :
Calculated I-V Characteristics Of A Gold LMIS Using The Image Hump And Charge Exchange Models
Author :
Miskovsy, S.N. ; Miskovsky, N.M. ; Cutler, P.H.
Author_Institution :
The Pennsylvania State University
Keywords :
Circuits; Gold; Helium; Ion beams; Ion sources; Lithography; Physics; Predictive models; Shape; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700293
