Title :
Parameter estimation in a dynamic model for rapid thermal processing: theory and experimental results
Author :
Belikov, Sergey ; Kaplinsky, Michael ; Friedland, Bernard
Author_Institution :
New Jersey Inst. of Technol., Newark, NJ, USA
Abstract :
The state variables of the dynamics of heat transfer in a rapid thermal processing system can be efficiently represented by the coefficients of a Bessel function expansion of the temperature distribution in a circular wafer. An algorithm developed in 1993 by Friedland is investigated for estimating parameters in the differential equations for the Bessel coefficients. Simulation results, which show excellent performance, are supported by favorable experimental results obtained in an actual RTP chamber
Keywords :
Bessel functions; closed loop systems; feedback; heat transfer; observers; parameter estimation; process control; rapid thermal processing; semiconductor process modelling; temperature distribution; Bessel coefficients; Bessel function expansion; circular wafer; differential equations; dynamic model; heat transfer; parameter estimation; rapid thermal processing; temperature distribution; Control systems; Force control; Heat transfer; Lamps; Parameter estimation; Rapid thermal processing; Semiconductor device modeling; Temperature control; Temperature measurement; Temperature sensors;
Conference_Titel :
American Control Conference, Proceedings of the 1995
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2445-5
DOI :
10.1109/ACC.1995.529196
