Investigations of TiO2 as a protective coating on diaphragm-based in vivo sensors

Author

Clausen, Ingelin ; Seeberg, Trine M. ; Gheorghe, Codin ; Prieur, Fabrice

Author_Institution

Dept. of Microsyst. & Nanotechnol., SINTEF, Oslo, Norway

fYear

2009

fDate

24-26 June 2009

Firstpage

21

Lastpage

24

Abstract

The motivation for these experiments has been to investigate the influence of a biocompatible protective coating on diaphragm-based in vivo sensors. The investigated device is a resonator for fish identification. Such a diaphragm-based configuration is also commonly used for pressure sensors. Six passive ID tags with a set of acoustic resonators have been coated with a 12 nm thin TiO₂ film by the atomic layer deposition (ALD) technique. The frequency response in the 200 kHz to 400 kHz range has been measured in water before and after coating. The resonance peaks can still be detected after coating, but an increase in the resonance frequencies of about 2 % is measured. The increase is explained by a thicker diaphragm due to the TiO₂ film.

Keywords

acoustic resonators; atomic layer deposition; bioMEMS; biomedical materials; biomedical ultrasonics; corrosion protective coatings; diaphragms; identification technology; microsensors; prosthetics; thin films; titanium compounds; TiO₂; acoustic resonator; atomic layer deposition; biocompatible protective coating; diaphragm-based in vivo sensors; fish identification; frequency 200 kHz to 400 kHz; passive ID tags; pressure sensors; resonance peaks; size 12 nm; thin film; Acoustic measurements; Acoustics; Biosensors; Coatings; Frequency measurement; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Wearable Micro and Nano Technologies for Personalized Health (pHealth), 2009 6th International Workshop on

Conference_Location

0slo

Print_ISBN

978-1-4244-5252-1

Electronic_ISBN

978-1-4244-5253-8

Type

conf

DOI

10.1109/PHEALTH.2009.5754821

Filename

5754821