Title :
Investigations of TiO2 as a protective coating on diaphragm-based in vivo sensors
Author :
Clausen, Ingelin ; Seeberg, Trine M. ; Gheorghe, Codin ; Prieur, Fabrice
Author_Institution :
Dept. of Microsyst. & Nanotechnol., SINTEF, Oslo, Norway
Abstract :
The motivation for these experiments has been to investigate the influence of a biocompatible protective coating on diaphragm-based in vivo sensors. The investigated device is a resonator for fish identification. Such a diaphragm-based configuration is also commonly used for pressure sensors. Six passive ID tags with a set of acoustic resonators have been coated with a 12 nm thin TiO2 film by the atomic layer deposition (ALD) technique. The frequency response in the 200 kHz to 400 kHz range has been measured in water before and after coating. The resonance peaks can still be detected after coating, but an increase in the resonance frequencies of about 2 % is measured. The increase is explained by a thicker diaphragm due to the TiO2 film.
Keywords :
acoustic resonators; atomic layer deposition; bioMEMS; biomedical materials; biomedical ultrasonics; corrosion protective coatings; diaphragms; identification technology; microsensors; prosthetics; thin films; titanium compounds; TiO2; acoustic resonator; atomic layer deposition; biocompatible protective coating; diaphragm-based in vivo sensors; fish identification; frequency 200 kHz to 400 kHz; passive ID tags; pressure sensors; resonance peaks; size 12 nm; thin film; Acoustic measurements; Acoustics; Biosensors; Coatings; Frequency measurement; Resonant frequency;
Conference_Titel :
Wearable Micro and Nano Technologies for Personalized Health (pHealth), 2009 6th International Workshop on
Conference_Location :
0slo
Print_ISBN :
978-1-4244-5252-1
Electronic_ISBN :
978-1-4244-5253-8
DOI :
10.1109/PHEALTH.2009.5754821
