Title :
Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials
Author :
Ponchak, E. ; Akinwande, D. ; Ciocan, R. ; LeClair, S.R. ; Tabib-Azar, M.
Author_Institution :
NASA Lewis Res. Center, Cleveland, OH, USA
Abstract :
An evanescent field microwave imaging probe based on half-wavelength, microwave transmission line resonators is described. Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolution and a minimum detectable line width of 0.4 /spl mu/m at 1 GHz.
Keywords :
UHF detectors; UHF measurement; coplanar waveguides; image resolution; microscopes; microstrip resonators; microwave imaging; 1 GHz; coplanar waveguide; coupling gap; data analysis; evanescent field microwave imaging probe; evanescent microwave probes; materials; metal lines; microwave transmission line resonators; optimization; probe tip design; semiconductor substrates; stripline; super-resolution imaging; Coplanar transmission lines; Coplanar waveguides; Couplings; Data analysis; Design optimization; Microwave imaging; Probes; Semiconductor waveguides; Stripline; Substrates;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.780335
