Applications of MEMS in communication satellites

Micro-electro-mechanical-systems (MEMS) are finding more and more applications in microwave systems. Communications satellites, which typically have a large microwave hardware content, will be discussed as an example of these potential applications. In the first part, general MEMS technology and early examples will be described. Next, space applications of MEMS (sensors, actuators, propulsion etc.) in a communications satellite vehicle (bus) will be shown. Finally, microwave applications of MEMS in satellite payloads (switches, micromachined structures, tunable filters, and phased array antennas) will be presented