Title :
High-Speed MEMS Micromirror Switching
Author :
Nielson, Gregory N. ; Olsson, Roy H., III ; Resnick, Paul R. ; Spahn, Olga Blum
Author_Institution :
Sandia Nat. Lab., Albuquerque
Abstract :
We report a high-speed MEMS micromirror that switches in 225 ns using 22 V. Switch repetition rates of up to 100 kHz have been demonstrated. These performance characteristics significantly extend the application space of micromirrors.
Keywords :
micromirrors; microswitches; optical switches; MEMS micromirror switching; switching speed; voltage 22 V; Electrodes; High speed optical techniques; Laboratories; Micromechanical devices; Micromirrors; Optical switches; Quantum computing; Telecommunication switching; Testing; Voltage control;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452612
