2D vertical-cavity laser arrays for free-space and multimode fiber transmission systems

We have fabricated single and multiple wavelength 2D vertical-cavity surface-emitting laser arrays with a 30 μm pitch. The center wavelength is around 980 nm. The 4×4 single wavelength laser arrays shows threshold currents of 570 μA and maximum output power levels of 1.05 mW with good uniformity. The 4×2 multiple wavelength arrays exhibit a total wavelength span of 17 nm with minimum threshold currents of 720 μA and maximum output powers of 0.46 mW. The wavelength distribution within the laser array is totally arbitrary. The fabrication of the multiple wavelength laser array employing anodic oxidation and molecular beam epitaxy regrowth is described