مرکز منطقه ای اطلاع رساني علوم و فناوري - Fabrication Of On-chip Anode Of Vacuum Micro-diode

DocumentCode :

3005322

Title :

Fabrication Of On-chip Anode Of Vacuum Micro-diode

Author :

Yoon, Yeong J. ; Yicheng Lu ; Lalevic, B. ; Zeto, Robert ; Piekars, R. ; Widuta, W. ; Zakar, E. ; Conrad, J.

Author_Institution :

Rutgers University

fYear :

1993

fDate :

12-15 Jul 1993

Firstpage :

101

Lastpage :

102

Keywords :

Anodes; Cathodes; Electron emission; Fabrication; Ion implantation; Laboratories; Low voltage; Microelectronics; Resists; Silicon;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN :

0-7803-0852-2

Type :

conf

DOI :

10.1109/IVMC.1993.700299

Filename :

700299

Link To Document :