Title :
Self-aligned Gated Field emitter arrays with integrated silicon-post feedback resistors
Author :
Zhang, Z. Lisa ; Santos, Edval J.P. ; MacDonald, Noel C.
Author_Institution :
Cornell University
Keywords :
Electron beams; Electron devices; Feedback; Field emitter arrays; Ion beams; Resistors;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700300
