DocumentCode
3005808
Title
A Self-atigned Gated Silicon Field Emitter Array
Author
Sullivan, T.E. ; Marcus, R.B.
fYear
1993
fDate
12-15 Jul 1993
Firstpage
105
Lastpage
105
Keywords
Atomic layer deposition; Dielectric breakdown; Dielectric substrates; Dielectrics and electrical insulation; Etching; Fabrication; Field emitter arrays; Oxidation; Physics; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700301
Filename
700301
Link To Document