DocumentCode :
3005808
Title :
A Self-atigned Gated Silicon Field Emitter Array
Author :
Sullivan, T.E. ; Marcus, R.B.
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
105
Lastpage :
105
Keywords :
Atomic layer deposition; Dielectric breakdown; Dielectric substrates; Dielectrics and electrical insulation; Etching; Fabrication; Field emitter arrays; Oxidation; Physics; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700301
Filename :
700301
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3005808
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