Title :
Low-Loss Al2O3 Waveguides for Active Integrated Optics
Author :
Wörhoff, K. ; Bradley, J.D.B. ; Ay, F. ; Pollnau, M.
Author_Institution :
Univ. of Twente, Enschede
Abstract :
Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.
Keywords :
aluminium compounds; integrated optics; laser beam etching; optical waveguides; Al2O3; active integrated optics; channel waveguides; co sputtered amorphous aluminum oxide; etching; low loss waveguides; Aluminum oxide; Amorphous materials; Integrated optics; Optical films; Optical losses; Optical refraction; Optical variables control; Optical waveguides; Plasma temperature; Sputtering;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452657
