• DocumentCode
    3006023
  • Title

    Low-Loss Al2O3 Waveguides for Active Integrated Optics

  • Author

    Wörhoff, K. ; Bradley, J.D.B. ; Ay, F. ; Pollnau, M.

  • Author_Institution
    Univ. of Twente, Enschede
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.
  • Keywords
    aluminium compounds; integrated optics; laser beam etching; optical waveguides; Al2O3; active integrated optics; channel waveguides; co sputtered amorphous aluminum oxide; etching; low loss waveguides; Aluminum oxide; Amorphous materials; Integrated optics; Optical films; Optical losses; Optical refraction; Optical variables control; Optical waveguides; Plasma temperature; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452657
  • Filename
    4452657
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3006023