Title :
Table top extreme ultraviolet holography
Author :
Wachulak, P.W. ; Bartels, R.A. ; Marconi, M.C. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution :
Colorado State Univ., Fort Collins
Abstract :
Table top holography with EUV laser was demonstrated. The hologram recorded in a photoresist was digitized with an AFM. The image was reconstructed achieving 380 nm spatial resolution determined using wavelet analysis and image correlation.
Keywords :
atomic force microscopy; holography; photoresists; ultraviolet sources; AFM; EUV laser; hologram; photoresist; spatial resolution; table top extreme ultraviolet holography; Atomic force microscopy; High-resolution imaging; Holographic optical components; Holography; Image reconstruction; Optical imaging; Pump lasers; Resists; Spatial resolution; Ultraviolet sources;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452662
