Title :
Fabrication Facilities and Operational Model at MIT´s Microsystems Technology Labs
Author_Institution :
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
fDate :
June 28 2010-July 1 2010
Abstract :
The mission of the Microsystems Technology Laboratories (MTL) is to provide facilities for education and research in micro and nano technology and innovative devices. This paper describes details of its operation, including cost structure, fab management and billing software, interactions with industry, government labs and other universities will be described.
Keywords :
computer aided instruction; electronic engineering education; invoicing; laboratory techniques; microfabrication; nanofabrication; MIT Microsystems Technology Lab; billing software; microtechnology; nanotechnology; university fab management; Computer industry; Computer network management; Costs; Educational institutions; Educational technology; Fabrication; Gold; Laboratories; Optoelectronic and photonic sensors; Semiconductor materials;
Conference_Titel :
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location :
West Lafayette, IN
Print_ISBN :
978-1-4244-4731-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2010.5508856
