DocumentCode
3006326
Title
2010 UGIM Table of contents
fYear
2010
fDate
June 28 2010-July 1 2010
Abstract
The following topics are dealt with: nanoelectronics; microfabrication; microelectronics; nanofabrication; carbon nanotubes; and mems devices.
Keywords
carbon nanotubes; microfabrication; micromechanical devices; nanoelectronics; nanofabrication; MEMS devices; carbon nanotubes; microelectronics; microfabrication; nanoelectronics; nanofabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location
West Lafayette, IN
ISSN
0749-6877
Print_ISBN
978-1-4244-4731-2
Type
conf
DOI
10.1109/UGIM.2010.5508859
Filename
5508859
Link To Document