DocumentCode
3006409
Title
CVD And PECVD Carbonization Of Silicon Microtips
Author
Zhirnov, V.V. ; Givargizov, E.I.
Author_Institution
Russian Academy of Sciences
fYear
1993
fDate
12-15 Jul 1993
Firstpage
110
Lastpage
111
Keywords
Chemical processes; Coatings; Crystallography; Geometry; Hydrocarbons; Oxidation; Plasma temperature; Semiconductor materials; Silicon carbide; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700304
Filename
700304
Link To Document