Title :
Microstructural Characterization Of Spindt Cathodes
Author :
Macaulay, J.M. ; Liddle, J.A. ; Spindt, C.A.
Author_Institution :
Silicon Video Corporation
Keywords :
Brightness; Cathodes; Crystallization; Electron emission; Image resolution; Microstructure; Scanning electron microscopy; Semiconductor thin films; Silicon; Transmission electron microscopy;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700306