• DocumentCode
    3006810
  • Title

    Microfluidic Bead Array Device Using Laser-Machined Surface Microstructures on Silica Glass

  • Author

    Sato, Tadatale ; Gumpenberger, Thomas ; Kurosaki, Ryozo ; Kawaguchi, Yoshizo ; Narazaki, Aiko ; Niino, Hiroyuki

  • Author_Institution
    Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Laser-induced backside wet etching (LIBWE) method can be applied for fabricating novel microfluidic devices. We have fabricated a microfluidic device incorporating two-dimensional array of microbeads with 10 mum diameter for selective DNA capturing.
  • Keywords
    DNA; arrays; bioMEMS; biochemistry; biological techniques; etching; glass; laser beam machining; microfluidics; molecular biophysics; SiO2; laser-induced backside wet etching method; laser-machined surface microstructures; microfluidic bead array device fabrication; selective DNA capturing; silica glass; size 10 mum; Chemical analysis; DNA; Fluorescence; Glass; Microfluidics; Microstructure; Optical arrays; Optical device fabrication; Silicon compounds; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452702
  • Filename
    4452702
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3006810