DocumentCode
3006820
Title
Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers
Author
Menoni, C.S. ; Brizuela, F. ; Brewer, C. ; Bravo, H. ; Langdon, B. ; Berrill, M. ; Martz, D. ; Vaschenko, G. ; Marconi, M.C. ; Rocca, J.J. ; Chao, W. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artioukov, I.A. ; Pershyn, Y.P. ; Kondratenko, V.V.
Author_Institution
Colorado State Univ., Fort Collins
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
Keywords
laser ablation; nanotechnology; optical microscopy; brightness; compact extreme ultraviolet lasers; nanometer-scale ablation; nanometer-scale imaging; nanoprobes; Brightness; Focusing; High-resolution imaging; Laser ablation; Laser beams; Optical imaging; Optical pumping; Semiconductor lasers; Spatial resolution; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4452703
Filename
4452703
Link To Document