DocumentCode :
3006820
Title :
Nanometer-scale imaging and ablation with Extreme Ultraviolet lasers
Author :
Menoni, C.S. ; Brizuela, F. ; Brewer, C. ; Bravo, H. ; Langdon, B. ; Berrill, M. ; Martz, D. ; Vaschenko, G. ; Marconi, M.C. ; Rocca, J.J. ; Chao, W. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artioukov, I.A. ; Pershyn, Y.P. ; Kondratenko, V.V.
Author_Institution :
Colorado State Univ., Fort Collins
fYear :
2007
fDate :
6-11 May 2007
Firstpage :
1
Lastpage :
2
Abstract :
The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
Keywords :
laser ablation; nanotechnology; optical microscopy; brightness; compact extreme ultraviolet lasers; nanometer-scale ablation; nanometer-scale imaging; nanoprobes; Brightness; Focusing; High-resolution imaging; Laser ablation; Laser beams; Optical imaging; Optical pumping; Semiconductor lasers; Spatial resolution; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
Type :
conf
DOI :
10.1109/CLEO.2007.4452703
Filename :
4452703
Link To Document :
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