Title :
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176)
Abstract :
The following topics are dealt with: AFM data storage; 3D technologies; optical devices; actuators; simulation; packaging and bonding; medical devices; fluidic devices; pressure sensors and microphones; inertial sensors; and acoustic systems
Keywords :
biomedical equipment; digital simulation; microactuators; micromechanical devices; microphones; microsensors; optical instruments; packaging; pressure sensors; semiconductor technology; 3D technologies; AFM data storage; Si; acoustic systems; bonding; fluidic devices; inertial sensors; medical devices; microactuators; microphones; microsensors; optical devices; packaging; pressure sensors; simulation;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg, Germany
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659715
