Title :
A Batch Fabricated Elastomeric Actuator with Large out of Plane Displacement
Author :
Maleki, Teimour ; Ziaie, Babak ; Chitnis, Girish
Author_Institution :
Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA
fDate :
June 28 2010-July 1 2010
Abstract :
Batch compatible laser micromachining of an elastomeric cantilever actuator composed of a polydimethylsiloxane (PDMS) bilayer (active/inactive) and soft-lithographically patterned conductive carbon grease electrodes is presented in this paper. Low actuation voltage and large out-of-plane displacement are unique characteristics of this new cantilever structure. An actuator which is 4mm long, 1mm wide, and 80μm thick can produce up to 1.2mm out of plane displacement and generate maximum force of 25μN when actuated by 450V.
Keywords :
elastomers; laser beam machining; microactuators; micromachining; soft lithography; batch compatible laser micromachining; batch fabricated elastomeric actuator; cantilever structure; elastomeric cantilever actuator; large out of plane displacement; low actuation voltage; polydimethylsiloxane bilayer; soft-lithographically patterned conductive carbon grease electrode; Actuators; Capacitive sensors; Electrodes; Low voltage; Mechanical engineering; Micromachining; Micromechanical devices; Muscles; Soft lithography; Transducers;
Conference_Titel :
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location :
West Lafayette, IN
Print_ISBN :
978-1-4244-4731-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2010.5508901
