Title :
Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques
Author :
Krupka, Jerzy ; Mazierska, Janina
Author_Institution :
Inst. of Microelectron. & Optoelectron., Warsaw Univ. of Technol., Warsaw, Poland
Abstract :
Progress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in non-destructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.
Keywords :
conducting polymers; dielectric resonators; graphene; metamaterials; monolithic integrated circuits; nanotechnology; nondestructive testing; conducting polymers; contactless measurements; dielectric resonator techniques; graphene; high-quality materials; high-quality semiconductors; metamaterials; microelectronics; nanotechnology; nondestructive measurements; Conductivity; Dielectrics; Materials; Permittivity; Permittivity measurement; Semiconductor device measurement; conductivity; dielectric resonators; graphen; graphene; metamaterials; microwave measurements; resistivity mapping; semiconductors; sheet resistance;
Conference_Titel :
TENCON 2011 - 2011 IEEE Region 10 Conference
Conference_Location :
Bali
Print_ISBN :
978-1-4577-0256-3
DOI :
10.1109/TENCON.2011.6129207
