DocumentCode :
3007332
Title :
Oxidized Amorphous Silicon As Gate Insulator For Field Mussiun Cathode Arrays
Author :
Peters, D. ; Stephani, D.
Author_Institution :
Siemens AG
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
119
Lastpage :
119
Keywords :
Adhesives; Amorphous silicon; Cathodes; Conductivity; Dielectric constant; Dielectric substrates; Dielectrics and electrical insulation; Inorganic materials; Oxidation; Research and development;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700309
Filename :
700309
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3007332
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