Title :
A MEMS Universal Fluid Quality Interrogation Sensor
Author :
Purrington, H.M. ; Puchades, I. ; Baylav, M. ; Fuller, L.F.
Author_Institution :
Dept. of Electr. & Microelectron. Eng., Rochester Inst. of Technol., Rochester, NY, USA
fDate :
June 28 2010-July 1 2010
Abstract :
This paper describes the design of a silicon chip that integrates multiple sensors together to monitor a variety of fluid quality parameters. The MEMS universal fluid quality interrogation sensor (MUFINS) eliminates the need to design a new chip for every fluid that requires quality control. The MUFINS chip is capable of measuring temperature, viscosity, liquid level, humidity, conductivity, pH, chlorine, and optical properties such as color and turbidity.
Keywords :
CMOS integrated circuits; microsensors; quality control; silicon; MEMS universal fluid quality interrogation sensor; MUFINS chip; chlorine; color; conductivity; humidity; liquid level; multiple sensors; optical properties; pH; quality control; silicon chip; temperature; turbidity; viscosity; Condition monitoring; Conductivity measurement; Humidity measurement; Micromechanical devices; Quality control; Semiconductor device measurement; Sensor phenomena and characterization; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location :
West Lafayette, IN
Print_ISBN :
978-1-4244-4731-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2010.5508919
