A MEMS Universal Fluid Quality Interrogation Sensor

Author

Purrington, H.M. ; Puchades, I. ; Baylav, M. ; Fuller, L.F.

Author_Institution

Dept. of Electr. & Microelectron. Eng., Rochester Inst. of Technol., Rochester, NY, USA

fYear

2010

fDate

June 28 2010-July 1 2010

Firstpage

1

Lastpage

5

Abstract

This paper describes the design of a silicon chip that integrates multiple sensors together to monitor a variety of fluid quality parameters. The MEMS universal fluid quality interrogation sensor (MUFINS) eliminates the need to design a new chip for every fluid that requires quality control. The MUFINS chip is capable of measuring temperature, viscosity, liquid level, humidity, conductivity, pH, chlorine, and optical properties such as color and turbidity.

Keywords

CMOS integrated circuits; microsensors; quality control; silicon; MEMS universal fluid quality interrogation sensor; MUFINS chip; chlorine; color; conductivity; humidity; liquid level; multiple sensors; optical properties; pH; quality control; silicon chip; temperature; turbidity; viscosity; Condition monitoring; Conductivity measurement; Humidity measurement; Micromechanical devices; Quality control; Semiconductor device measurement; Sensor phenomena and characterization; Silicon; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry

Conference_Location

West Lafayette, IN

ISSN

0749-6877

Print_ISBN

978-1-4244-4731-2

Electronic_ISBN

0749-6877

Type

conf

DOI

10.1109/UGIM.2010.5508919

Filename

5508919