Title :
Microelectromechanical devices for wireless communications
Author :
Nguyen, Clark T C
Author_Institution :
Center for Integrated Sensors & Circuits, Michigan Univ., Ann Arbor, MI, USA
Abstract :
An overview of recent progress in the research and development of microelectromechanical devices for use in wireless communication sub-systems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, low loss micromechanical switches, and micro-scale vibrating mechanical resonators with Q´s in the tens of thousands. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and future wireless transceivers
Keywords :
acoustic resonator filters; bulk acoustic wave devices; capacitors; inductors; micromechanical devices; micromechanical resonators; mobile radio; radiofrequency filters; reviews; switches; transceivers; RF filters; VCO; bulk acoustic resonators; integrated high-Q inductors; low loss micromechanical switches; micro-scale vibrating mechanical resonators; microelectromechanical devices; miniaturization; performance enhancement; tunable micromachined capacitors; wireless communication subsystems; wireless transceivers; CMOS technology; Capacitors; Frequency; Inductors; Microelectromechanical devices; Micromechanical devices; Resonator filters; Switches; Transceivers; Wireless communication;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659719
