Title :
Design methodology of piezoresonant sensors construction with a modulated interelectrode gap
Author :
Taranchuk, Alla ; Pidchenko, Segey ; Skovryha, Olena
Author_Institution :
Dept. of Radioelectron. Devices & Telecommun., Khmelnytsky Nat. Univ., Khmelnytsky, Ukraine
Abstract :
This paper represents constructive and mechanical schemes of piezoresonant sensor, considers its basic electrical characteristics and shows the necessity of taking into account the non-parallelism of the electrodes while projecting sensors with modulated interelectrode gap.
Keywords :
electrodes; piezoelectric devices; resonance; sensors; design methodology; electrical characteristics; modulated interelectrode gap; nonparallelism; piezoresonant sensors construction; Electrodes; Frequency modulation; Mechanical sensors; Resonant frequency; Sensor phenomena and characterization; Sensor systems; modulated interelectrode gap; modulation characteristic; non-parallelism of the electrodes; piezoelectric element; sensor;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2015 IEEE 35th International Conference on
Conference_Location :
Kiev
DOI :
10.1109/ELNANO.2015.7146913
